An overview of 3D structuring in microdomain.(MoO3 )x thin films.

Y P Kathuria


In the emerging field of microrobotics and microelectromechanical systems, complex mechanical parts are gaining importance. On one hand, the overall size and shape of the product is becoming continuously smaller and more complex, and on the other the new product demand/offer is increasing manifold. To overcome this problem, we need a new organizational structure for product development and new technology. This paper highlights various processes, viz. microstereolithography of polymer resin, selective laser sintering of metallic powder as well as melting processes using lasers for rapid prototyping of three-dimensional parts in microdomain.of spincoated film of PMMA on silicon wafer is an important parameter for its use as an etch mask, while etching in aqueous KOH solution for silicon micromachining. Pre- and posttreatments have been performed on silicon substrate and the mask layer to achieve greater adhesion of the mask material. Feasibility is demonstrated of the use of PMMA as etch mask.made to crystallize the thin films at as low a processing temperature as possible. The properties studied include dielectric measurements and hysteresis. Thin films of calcium-modified lead titanate (PCT) were also prepared by the sol gel technique and their pyroelectric characteristics were studied for use in infrared was coated. These results show that the crystalline quality and deposition rate can be controlled over a wide range by this method.


Laser; microstereolithography; lamination; laser sintering; microcladding and microstructuring

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